The interdisciplinary Utah micro-and nano-scale Science and Engineering Core Laboratories support innovation, education, research, and technology transfer. The cleanroom facilities and equipment are available as a "recharge center" to researchers at Utah colleges and universities as well as to new and established companies. The teaching laboratories underpin undergraduate microfabrication curricula and train graduate students from across the UU campus.
The Colleges and University VP's combine physical and human resources to support:
We have developed a system to enable PI's to obtain "preliminary data" for targeted funding solicitations by using University-sponsorship to pay for several months (as approved) of microfabrication and characterization user fees.
A ~5300 sq. ft. multi-purpose cleanroom facility providing the environment necessary for micromachining, and microfabrication, semiconductor materials and device research.
The laboratories have equipment for the deposition of materials (i.e., sputtering, electron beam evaporation, thermal evaporation, conformal parylene, plasma enhanced chemical vapor deposition, low pressure chemical vapor deposition of polySi and Si-nitride); photolithography (e.g., Cr-on-glass and emulsion mask making, photoresist spinners and coaters, hot plates, ovens, mask aligners, design stations). The laboratory also has B & P solid state diffusion furnaces, annealing furnaces, and wet/dry oxidation furnaces. Micromachining support includes 1064nm and 248nm laser micromachining, electrodeposition, KOH etching, planarization, dicing and wirebonding. Characterization includes a pending multifunction surface analysis instrument, optical microscopy, an atomic force microscope (AFM), electrical probe station with C/V and I/V test / characterization equipment. Mechanical fatigue testing of microsystems is available.
A combination of donated equipment (Fairchild Semiconductor and Micron Technology, Inc.) with new and renovated equipment provided through federal and state funds. These labs are comprised of three primary teaching spaces: Semiconductor teaching and Micromachining teaching, separated by a shared photolitography teaching lab.
The semiconductor teaching lab, renovated in summer '03 houses diffusion furnaces, wet and dry oxidation furnaces, wet benches and a thermal evaporator for metallization processing. Also included are characterization tools: optical inspection, ellipsometry, four-point-probe, stylus profilometry, C/V and I/V measurement in a vibration isolated probe station.
The Micromachining teaching lab houses a tube furnace, box furnace, laser patterning tool, precision polishing/planarizing tool, microscopes, a probe station, as well as wet benches for use with KOH etching and electroplating.
The shared photolithography teaching lab, also recently renovated, houses resist spin and bake stations, two contact/proximity aligners, and wet benches for develop and etch operations. An optical microscope is equipped with digital image acquisition and dimensional measurement.
Some teaching operations are supported in certain technical aspects by the adjacent microfabrication research laboratory, and research rates are paid by the courses: Mask making, sputtering, dry etching, polysilicon deposition and etching.
Advanced Physical Vapor Deposition (PVD)
Recently installed is a new dual-chamber high vacuum sputtering system from TM Vacuum. The TMV Super Series SS-40C-IV Multi Cathode Sputtering system is configured with a dual-chamber / independently cryopumped load lock (base pressure 2x10-7 torr). Six cathodes are configured for variations of sequential or simultaneous sputtering or reactive sputtering. One cathode is permanently fitted with a ~60in2 ITO target. Two additional sputtering systems are available, or users can elect to choose from e-beam evaporation and thermal evaporation as alternate PVD techniques. This system complements an existing Denton three-cathode sputtering system, a Denton E-beam evaporation system, a CHA thermal evaporator, and two SFI sputtering systems.
Photolithographic Patterning
Complete mask making facilities include an Electromask TRE Criss-Cross pattern generator with step and repeat camera and environmental control for repeatable high performance. Light field or dark field chromium coated 3", 4", or 5" masks can now be produced. Reversal processes are available. At this time the minimum feature size for the step and repeat camera is 5 microns, and the minimum size for the 5x reduction step and repeat system is 1 micron. A new Suss/Microtech dual-side aligner (MA 1006) and EVG 420 contact/proximity aligner provides front/backside alignment for multi-layer lithographic patterning. Both wet and dry (RIE plasma) etching processes are available.
Laser Micromachining
We have two systems for laser micromachining:
Q-switched Nd:YAG (1064nm TLSI model HM 400E) laser operating at up to 35W and 50kHz. This system runs a spot size of approximately 100 microns and is useful for machining metals, silicon, and other reflective surfaces.
KrF excimer laser (Micromaster / Optek) operating at 248nm. The UV system operates at a maximum of 6W and a minimum spot size of 5 microns. It is useful in ablating polycarbonates, epoxies, and some other polymeric and glass materials.
The mission of the college of Engineering is:
The really tough problems with the greatest potential for significant breakthroughs lie at the interfaces between traditional academic disciplines, where the science, language, and culture inhibit good communications. The key interface between nanoscience and biology, including the specific topic of nanomedicine is one of the important areas where the university, regional universities, and the state have existing strengths to build upon.
Growing bio-tech and nano-tech companies in Utah depends upon a community-accessible infrastructure to supply key fabrication and characterization tools and expertise needed for advanced product development. A "poster child" is the Utah Neural Array developed in the Utah Microfabrication Core Lab by Richard Normann who effectively established an engineering linkage to a series of medical applications. This effort became commercialized in his Bionic Technologies, Inc. then in Cyberkinetics with the ultimate development of a new, local cleanroom, accompanying jobs and additional University collaborations. There have been two human surgeries (motor cortex implant) with the commercial Cyberkinetics Electrode Assembly, enabling quadriplegic individuals to begin controlling computers and artificial limbs through their volitional thoughts. Further substantial NIH grants have been awarded to Utah PI's based on development of this and related local know-how.
Anticipated outcomes from similar collaborative efforts include new ideas through effective seeded collaborations (facilitated by seminars, open use labs and other interactions); more effective research proposals seeded by user fee sponsorship to obtain preliminary data; superior research enabled by better equipment, instrumentation, & expertise; and more, stronger companies maturing through start-up, based on an industrial preliminary data seed fund and cost-effective access to needed sponsored resources.
Cyberkinetics
Richard Norman
Utah Governor's Engineering Initiative
NSF IGERT Program
Fairchild Semiconductor
Micron Technology, Inc.
SUSS MicroTec
Electronic Visions, Inc.
T-M Vacuum Systems
M+W Zander
Zygo Corporation
HEDCO (Founding Donation)
We have collaborated with Weber State University for the purposes of encouraging improved K-12 hands-on access to extracurricular secondary education science and engineering programs. The targeted Science Olympiad program is an existing, successful nationwide program well established in Utah (based at WSU); but with much opportunity to grow and impact more schools and districts. Beginning with the U of U, several campuses have recognized the important potential this program provides for stimulating and maintaining interest in science and engineering, especially among underrepresented groups.
The U of U (via the Mechanical Engineering department) was the first campus to begin offering scholarships and to actively recruit among this group of science-impassioned students self-selected for their interest, aptitude, and work ethic. The microfab has directly sponsored (through the use of discretionary funds) the Utah Science Olympiad, and is active in recruiting at that venue, with support from the College of Engineering Dean's office, and the office of U of U Student Recruitment & High School Services.
An undergraduate certificate program is under development to provide freshman and sophomore-level coursework that can be transferred into other state campuses and community college programs.
Given the advanced imaging tools supplied by the National Science Foundation and others, we are searching for sponsors that will enable the development of permanent exhibits at the Leonardo and/or the Utah Children's museum.
Scanning electron microscopy is a most visible means for Materials Science to "connect" with the community at-large. While some lab equipment is difficult to explain to pre-engineers, the "3-dimensional" and surface textured -almost "tactile"-quality of SEM micrographs makes it intuitively easy to stimulate the imagination of young people. We expect this capability will facilitate greater interest and foster curiosity in MSE at a younger age and within a broader spectrum of currently under-represented groups.
New microscopy tools will have a substantial side benefit to promote and expand the wonders of the "small, new world of microspace" to youth. Microscopy is one of the most awe-inspiring aspects of science, simply because of the visual nature of the effort, coupled with the under-your-nose nature of microscopic discovery. This will be done by uniquely bridging key gaps that currently prevent many individuals from intuitively connecting their own world of visual experience to the unfamiliar microscopic world.
The proposed exhibit for The Children's Museum could emphasize imaging in the "micro/nano-world", providing context to the patrons through relationships of decreasing dimensional scale, beginning with the familiar. We propose a remote (at the exhibit) viewing of samples under study in the lab, subject to the permission of the operator, as well as a library of previous imaging sessions. Plans call for groups at the exhibit to schedule (approximately one hour per week) live control over viewing of their own samples. This exhibit will allow the introduction of nano materials science to the hundreds of thousands of visitors expected every year.
College of Engineering
School of Medicine
College of Pharmacy
Collge of Science
College of Mines & Earth Sciences
| Disclaimer | 50 South Campus Dr. ▪ MEB Suite 1280 ▪ SLC UT 84112 | (801) 581-5676 | microfab@eng.utah.edu |