Nanofab News
Welcome Dr. Shkel of DARPA The Utah nanofab welcomes Dr. Andrei Shkel of the Defense Advanced Research Projects Agency (DARPA) New equipment CMP is up and running. We are pleased to offer this service on a Stasbaugh 6ec obtained from Axus Technologies. We have a new XeF2 release etch system from XActix, supporting sacrificial polysilicon in MEMS processes. Available for processing. ALD (Cambridge Scientific) is available for deposition of Al2O3. See staff for details. Our new 5" tube furnaces from Expertech will initially support LTO/PSG deposition, and a phos-doped polySi. This is expected to be qualified for processing during March. We have an FEI Quanta 3D FEG available for imaging and W-nano deposition. Also highly capable for precision cross-sections. We are pleased to announce the acquisition of a new EVG 520IS wafer bonder. This tool is capable of 700N-60kN force, in a chamber capable of 10^-3 mBar to +1 atmosphere. Available processes include hot embossing, anodic bonding, and thermal bonding on the following chuck sizes: 2", 4" and piece parts. What is a nanofab? A "poster child" is the Utah Neural Array developed in the Utah Microfabrication Core Lab by Richard Normann who effectively established an engineering linkage to a series of medical applications. This effort became commercialized in his Bionic Technologies, Inc. then in Black Rock with the ultimate development of a new, local cleanroom, accompanying jobs and additional University collaborations. There have been multiple human surgeries (motor cortex implant) with the commercial Electrode Assembly, enabling quadriplegic individuals to begin controlling computers and artificial limbs through their volitional thoughts. Further substantial NIH grants have been awarded to Utah PI's based on development of this and related local know-how.
Anticipated outcomes from similar collaborative efforts include new ideas through effective seeded collaborations (facilitated by seminars, open use labs and other interactions); more effective research proposals seeded by user fee sponsorship to obtain preliminary data; superior research enabled by better equipment, instrumentation, & expertise; and more, stronger companies maturing through start-up, based on an industrial preliminary data seed fund and cost-effective access to needed sponsored resources. Welcome to new microfab staff! Tony joins us as Staff LPCVD process engineer and cleanroom supervisor. He has half-a-career worth of experience in the semiconductor industry, where he developed and sustained thermal processes. We are especially happy to have him, given our current project (pardon the dust!) to install, characterize and train folks in the use of the new LTO/PSG furnace from Expertech, along with its bunkmate, the phos-doped polySi tube. Kevin joins us as our Equipment Maintenance Specialist, out of the University of Tulsa. He has already demonstrated proficiency in debugging and improving out pattern generator. He is also working on our preventative maintenance schedule for the other tools. While we were sad to lose our IGERT engineer, Justin Millis, to the University of Maine, we are very pleased to announce that Charles Fisher has joined us, having recently obtained his M.S. degree in Mechanical Engineering. Charles has already assisted installing the new ALD machine, has rebuilt the excimer laser, and is assisting on the installation of the new LPCVD stack. We are very pleased with the formation of our team, who are all all dedicated to the successful outcomes of the many research projects inside the fab. Cleanroom Protocols …or you may not graduate in this field! It is a community environment, and the success of your research involves your willingness to follow protocols, as well as your willingness to speak with colleagues (researchers and staff) when you see lax or forgetful practices. The New Sorenson Molecular Biotechnology Building: Coming Fall 2011 The cleanroom will house state-of-the-art fabrication tools for producing heterogeneous microsystems, including electronic, photonic, microfluidic and mechanical functionality. Sensors, bio-implants, actuators and other device test beds are all fabricated in this facility. Companies use the facilities and expertise to conceive and test marketable devices and products, spinning off new, local manufacturing plants and creating new jobs. Key fabrication equipment and USTAR-supporting instrumentation will be consolidated from points around campus and combined with new tools, including acquisitions planned through the American Reinvestment and Recovery Act, together making Utah a world-class location for biomedical sensors research, and supporting many other related research activities. http://www.innovationutah.com/USTARBuildings.htm Philosophy All instruments will be operated as user instruments where students with significant needs for data are trained to operate the system. Expert staff assistance will also be available to collect data for researchers with infrequent needs or no interest in being trained. Only trained users will be able to operate the equipment. Training will involve a semester long special topics course or working one-on-one with a staff person until deemed competent to operate the system. A steering committee oversees the instruments and acts as advocates within the university community.
